Concepedia

Denis Guiheux

DG

Statistics

Publications

2

Citations

26

H-Index

2

Active since

2011

Affiliations

STMicroelectronics (France)(Current)

Denis Guiheux is an author at STMicroelectronics (France) specializing in materials engineering, materials science, and electronic materials.

Publications per year

2011–2015

2

Publications

2

Study of stress in tensile nitrogen-plasma-treated multilayer silicon nitride films

P. Morin, Gaetan Raymond, Daniel Benoit et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 16 citations

, , +17

Investigation of the TiN/photoresist interface degradation during a wet etch

Mathieu Foucaud, Denis Guiheux, David Pinceau et al. · Microelectronic Engineering · 2015 · 10 citations

, , +14

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