Hsu-Ting Huang - Concepedia

Author

Hsu-Ting Huang

Also Known As

Hsu-Ting Huang

Publications

161

Citations

H-Index

Concepts

All Affiliations

Hsu-Ting Huang is an author at University of Michigan specializing in instrumentation, optical properties, and measurement.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	112
2	Natural Sciences	2	2	112
3	Applied Physics	1	1	87
4	Materials Science	1	1	87
5	Optical Engineering	1	1	25

Hsu-Ting Huang

Publications

135

Citations

H-Index

Page 1

	Year	Citations
Normal-incidence spectroscopic ellipsometry for critical dimension monitoring Hsu-Ting Huang, Wei Kong, Fred L. Terry Applied Physics Letters EngineeringElectron-beam LithographyMeasurementMicroscopyNormal-incidence Spectroscopic Ellipsometry	2001	87
Scatterometry-based overlay metrology Hsu-Ting Huang, Gayathri Raghavendra, Apo Sezginer, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringMeasurementOptical TestingOptical MetrologyOptical Characterization	2003	25
Two-channel spectroscopic reflectometry for<i>in situ</i>monitoring of blanket and patterned structures during reactive ion etching Brooke S. Stutzman, Hsu-Ting Huang, Fred L. Terry Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena	2000	23

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