Concepedia

Hsu-Ting Huang

HH

Statistics

Publications

3

Citations

135

H-Index

3

Active since

2000

Affiliations

University of Michigan(Current)

Hsu-Ting Huang is an author at University of Michigan specializing in materials science, spectroscopy, and optical spectroscopy.

Publications per year

2000–2003

3

Publications

3

Normal-incidence spectroscopic ellipsometry for critical dimension monitoring

Hsu-Ting Huang, Wei Kong, Fred L. Terry · Applied Physics Letters · 2001 · 87 citations · Full text

Natural Sciences, Materials Science, Semiconductor Devices +16

Scatterometry-based overlay metrology

Hsu-Ting Huang, Gayathri Raghavendra, Apo Sezginer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +17

Two-channel spectroscopic reflectometry for<i>in situ</i>monitoring of blanket and patterned structures during reactive ion etching

Brooke S. Stutzman, Hsu-Ting Huang, Fred L. Terry · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 23 citations

Engineering, Materials Engineering, Materials Science +17

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