Concepedia

T. Chu

TC

8

Publications

289

Citations

8

H-Index

1991

Active since

Affiliations

The University of Texas at Austin(Current)

Division of Materials Science and Engineering

T. Chu is an author at The University of Texas at Austin specializing in materials science, engineering, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMaterials EngineeringElectrical EngineeringMicroelectronicsNanoelectronicsThin FilmsOxide SemiconductorsElectrical Insulation

Publications per year

1991–2016

8

Publications

8

MOS characteristics of ultrathin SiO/sub 2/ prepared by oxidizing Si in N/sub 2/O

W. Ting, G. Q. Lo, Jinho Ahn et al. · IEEE Electron Device Letters · 1991 · 78 citations

Engineering, Oxidation Resistance, Ultrathin Sio/sub 2/ +16

Study of the composition of thin dielectrics grown on Si in a pure N2O ambient

T. Chu, W. Ting, Jinho Ahn et al. · Applied Physics Letters · 1991 · 50 citations

Materials Science, Ultrathin Oxides, Electrical Engineering +14

High Quality Ultrathin Gate Dielectrics Formation by Thermal Oxidation of Si in N 2 O

Junhyeok Ahn, W. Ting, T. Chu et al. · Journal of The Electrochemical Society · 1991 · 39 citations

Engineering, Thermal Oxidation, Silicon On Insulator +17

Thickness and Compositional Nonuniformities of Ultrathin Oxides Grown by Rapid Thermal Oxidation of Silicon in N 2 O

T. Chu, Windsor Ting, Jae-Hyun Ahn et al. · Journal of The Electrochemical Society · 1991 · 38 citations

Engineering, Oxidation Resistance, Chemical Composition +19

High quality thin gate oxide prepared by annealing low-pressure chemical vapor deposited SiO2 in N2O

Jinho Ahn, W. Ting, T. Chu et al. · Applied Physics Letters · 1991 · 29 citations

Materials Science, Materials Engineering, Electrical Engineering +15

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