Concepedia

J. T. Chen

JT

Statistics

Publications

2

Citations

50

H-Index

2

Active since

1979

Affiliations

University of Illinois Urbana-Champaign(Current)

J. T. Chen is an author at University of Illinois Urbana-Champaign specializing in silicon doping, semiconductor device materials, and semiconductor devices.

Publications per year

1979–1984

2

Publications

2

Inorganic resist for dry processing and dopant applications

M. S. Chang, T. W. Hou, J. T. Chen et al. · Journal of Vacuum Science and Technology · 1979 · 28 citations

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Structural and electrical properties of BF+2 implanted, rapid annealed silicon

M. E. Lunnon, J. T. Chen, J. E. Baker · Applied Physics Letters · 1984 · 22 citations

, , +17

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