M. E. Lunnon

Furnace and Rapid Thermal Annealing of P+/n Junctions in  BF 2  +  ‐ Implanted Silicon

M. E. Lunnon, Junhan Chen, J. E. Baker · Journal of The Electrochemical Society · 1985 · 30 citations

Engineering, Materials Engineering, Materials Science +17

Structural and electrical properties of BF+2 implanted, rapid annealed silicon

M. E. Lunnon, J. T. Chen, J. E. Baker · Applied Physics Letters · 1984 · 22 citations

Engineering, Materials Engineering, Materials Science +17

Gettering of Copper in Silicon‐on‐Insulator Structures Formed by Oxygen Ion Implantation

M. Delfino, M. Jaczynski, A. E. Morgan et al. · Journal of The Electrochemical Society · 1987 · 22 citations

Engineering, Electrical Engineering, Materials Science +17

A Structural and Electrical Comparison of BCl and  BF 2 Ion‐Implanted Silicon

M. Delfino, M. E. Lunnon · Journal of The Electrochemical Society · 1985 · 19 citations

Engineering, Materials Engineering, Materials Science +17

The microstructure of programmed <i>n</i>+<i>p</i> <i>n</i>+ polycrystalline silicon antifuses

M. E. Lunnon, David W. Greve · Journal of Applied Physics · 1983 · 11 citations

Engineering, Electrical Engineering, Materials Science +14