Concepedia

E. H. Payne

EH

Statistics

Publications

1

Citations

111

H-Index

1

Active since

1990

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

E. H. Payne is an author at IBM Research - Thomas J. Watson Research Center specializing in microfabrication, engineering, and applied physics.

Top concepts

Publications per year

1990–1990

1

Publications

1

Study of sidewall passivation and microscopic silicon roughness phenomena in chlorine-based reactive ion etching of silicon trenches

G. S. Oehrlein, John F. Rembetski, E. H. Payne · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 111 citations

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