Concepedia

Susanne Ohsiek

SO

Statistics

Publications

2

Citations

80

H-Index

2

Active since

2012

Affiliations

GlobalFoundries (Germany)(Current)

Susanne Ohsiek is an author at GlobalFoundries (Germany) specializing in materials science, engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsNanoelectronicsSurface ScienceElectrochemistryMicroelectronicsElectronic PackagingElectrical Insulation

Publications per year

2012–2013

2

Publications

2

Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration

Dina H. Triyoso, K. Hempel, Susanne Ohsiek et al. · ECS Journal of Solid State Science and Technology · 2013 · 48 citations

Materials Science, Materials Engineering, Electrical Engineering +12

TEMAZ/O3 atomic layer deposition process with doubled growth rate and optimized interface properties in metal–insulator–metal capacitors

Wenke Weinreich, Tina Tauchnitz, P. Polakowski et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 32 citations

Materials Science, Metal–insulator–metal Capacitors, Epitaxial Growth +14

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