Statistics
Publications
7
Citations
123
H-Index
7
Active since
1992
Affiliations
University of Stuttgart(Current)
Uwe A. Griesinger is an author at University of Stuttgart specializing in engineering, photonics, and applied physics.
Publications per year
1992–2006
7
7
Uwe A. Griesinger, H. Schweizer, S. Kronmüller et al. · IEEE Photonics Technology Letters · 1996 · 15 citations
Optimizing edge topography of alternating phase-shift masks using rigorous mask modeling
Christoph M. Friedrich, Leonhard Mader, Andreas Erdmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 12 citations
Geometric Modeling, Engineering, Electron-beam Lithography +15
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