Concepedia

Oliver Rosier

OR

13

Publications

369

Citations

12

H-Index

1999

Active since

Affiliations

Fraunhofer Institute for Laser Technology(Current)

Philips (Germany)

Philips (Finland)

RWTH Aachen University

Oliver Rosier is an author at Fraunhofer Institute for Laser Technology specializing in engineering, electrical engineering, and instrumentation.

Top concepts

Publications per year

1999–2010

13

Publications

13

Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma

K. Bergmann, Guido Schriever, Oliver Rosier et al. · Applied Optics · 1999 · 98 citations

, , +10

Pinch-plasma radiation source for extreme-ultraviolet lithography with a kilohertz repetition frequency

K. Bergmann, Oliver Rosier, W. Neff et al. · Applied Optics · 2000 · 38 citations

Frequency scaling in a hollow-cathode-triggered pinch plasma as radiation source in the extreme ultraviolet

Oliver Rosier, R. Apetz, K. Bergmann et al. · IEEE Transactions on Plasma Science · 2004 · 35 citations

, , +17

The efficiency of coaxial KrCl<sup>*</sup> excilamps

Xiaobo Zhuang, Qiuyi Han, Haojun Zhang et al. · Journal of Physics D Applied Physics · 2010 · 34 citations

, , +12

A multi-kilohertz pinch plasma radiation source for extreme ultraviolet lithography

K. Bergmann, Oliver Rosier, R. Lebert et al. · Microelectronic Engineering · 2001 · 32 citations

, , +3

Rows per page

1–5 of 13