Concepedia

R. Lebert

RL

24

Publications

700

Citations

17

H-Index

1989

Active since

Affiliations

Fraunhofer Institute for Laser Technology(Current)

RWTH Aachen University

Aixtron (Germany)

Physikalisch-Technische Bundesanstalt

R. Lebert is an author at Fraunhofer Institute for Laser Technology specializing in engineering, applied physics, and physics.

Top concepts

Publications per year

1989–2015

24

Publications

24

Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma

K. Bergmann, Guido Schriever, Oliver Rosier et al. · Applied Optics · 1999 · 98 citations

, , +10

Fundamentals and limits for the EUV emission of pinch plasma sources for EUV lithography

Thomas Krücken, K. Bergmann, Larissa Juschkin et al. · Journal of Physics D Applied Physics · 2004 · 70 citations

Pinch Plasma Source for X-Ray Microscopy with Nanosecond Exposure Time

R. Lebert · Journal of X-Ray Science and Technology · 1996 · 57 citations

Atmospheric pressure gas discharges for surface treatment

K. Pochner, W. Neff, R. Lebert · Surface and Coatings Technology · 1995 · 42 citations

, , +5

Pinch-plasma radiation source for extreme-ultraviolet lithography with a kilohertz repetition frequency

K. Bergmann, Oliver Rosier, W. Neff et al. · Applied Optics · 2000 · 38 citations

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