Concepedia

Akio Ui

AU

3

Publications

59

Citations

3

H-Index

1992

Active since

Affiliations

Toshiba (Japan)(Current)

Akio Ui is an author at Toshiba (Japan) specializing in engineering, electrical engineering, and electrochemistry.

Top concepts

EngineeringApplied PhysicsSurface ScienceElectrochemistryElectrical EngineeringPhysicsChemistryPlasma PhysicsPlasma ScienceMultiphase Flow

Publications per year

1992–2020

3

Publications

3

Numerical simulations of stable, high-electron-density atmospheric pressure argon plasma under pin-to-plane electrode geometry: effects of applied voltage polarity

Yosuke Sato, Kenji Ishikawa, Takayoshi Tsutsumi et al. · Journal of Physics D Applied Physics · 2020 · 31 citations · Full text

Engineering, Glow Discharge, Plasma Science +18

Sub-45 nm SiO<sub>2</sub> Etching with Stacked-Mask Process Using High-Bias-Frequency Dual-Frequency-Superimposed RF Capacitively Coupled Plasma

Keisuke Kikutani, Takashi Ohashi, Akihiro Kojima et al. · Japanese Journal of Applied Physics · 2008 · 17 citations

Electrical Engineering, Engineering, Plasma Processing +13

Surface-enhanced resonance Raman scattering study on the axial ligation states of manganese and chromium tetraphenylporphines adsorbed on silver electrode surfaces

Tatsushi Okumura, Akio Ui, Koichi Itoh · Inorganic Chemistry · 1992 · 11 citations

Materials Science, Inorganic Chemistry, Surface Characterization +14

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