Kevin E. Docherty

Nanofabrication of high aspect ratio (∼50:1) sub-10 nm silicon nanowires using inductively coupled plasma etching

Muhammad Mirza, Haiping Zhou, Philippe Velha et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012 · 91 citations

Engineering, Materials Engineering, Materials Science +17

Design and fabrication of diffractive atom chips for laser cooling and trapping

J. P. Cotter, J. P. McGilligan, Paul F. Griffin et al. · Applied Physics B · 2016 · 42 citations · Full text

Natural Sciences, Physics, Microfabrication +13

InGaN/GaN Distributed Feedback Laser Diodes With Deeply Etched Sidewall Gratings

Thomas J. Slight, Opeoluwa Odedina, W. Meredith et al. · IEEE Photonics Technology Letters · 2016 · 27 citations

Engineering, Electrical Engineering, Materials Science +17

Alignment verification for electron beam lithography

S. Thoms, D.S. Macintyre, Kevin E. Docherty et al. · Microelectronic Engineering · 2014 · 21 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +9

InGaN/GaN Laser Diodes With High Order Notched Gratings

Thomas J. Slight, Amit Yadav, Opeoluwa Odedina et al. · IEEE Photonics Technology Letters · 2017 · 17 citations · Full text

Engineering, Electrical Engineering, Materials Science +17