Concepedia

Satoshi Ogushi

SO

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Publications

1

Citations

21

H-Index

1

Active since

1997

Affiliations

Sumco Corporation (Japan)(Current)

Satoshi Ogushi is an author at Sumco Corporation (Japan) specializing in defect characterization, silicon impurities, and electronic materials.

Publications per year

1997–1997

1

Publications

1

Gettering Characteristics of Heavy Metal Impurities in Silicon Wafers with Polysilicon Back Seal and Internal Gettering

Satoshi Ogushi, Shinsuke Sadamitsu, Kieran Marsden et al. · Japanese Journal of Applied Physics · 1997 · 21 citations

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