Concepedia

Michael P. Splichal

MP

Statistics

Publications

4

Citations

408

H-Index

4

Active since

1992

Affiliations

University of New Mexico(Current)

Sandia National Laboratories

Michael P. Splichal is an author at University of New Mexico specializing in plasma diagnostics, natural sciences, and plasma physics.

Publications per year

1992–1995

4

Publications

4

The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges

P. J. Hargis, K. E. Greenberg, Paul Miller et al. · Review of Scientific Instruments · 1994 · 332 citations · Full text

Natural Sciences, Electrical Engineering, Microelectronics +14

Electrical isolation of radio-frequency plasma discharges

Paul Miller, H. Anderson, Michael P. Splichal · Journal of Applied Physics · 1992 · 51 citations

Natural Sciences, Electrical Engineering, Physics +13

<title>Application of chemometrics to optical emission spectroscopy for plasma monitoring</title>

Michael P. Splichal, H. Anderson · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1992 · 14 citations

Natural Sciences, Physics, Plasma Physics +15

<i>In situ</i> diode laser absorption measurements of plasma species in a gaseous electronics conference reference cell reactor

Daniel B. Oh, Alan C. Stanton, H. Anderson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 11 citations

Engineering, Chemistry, Materials Science +17

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