Concepedia
Statistics
Publications
3
Citations
45
H-Index
Active since
1991
Yoshinori Sawado is an author specializing in thin films, chemical vapor deposition, and natural sciences.
Publications per year
1991–1996
Metal Complexes for Preparing Ferroelectric Thin Films by Metalorganic Chemical Vapor Deposition
Tomoaki Nakai, Toshiya Tabuchi, Yoshinori Sawado et al. · Japanese Journal of Applied Physics · 1992 · 17 citations
Natural Sciences, Chemistry, Materials Science +15
Application of Penta-Di-Methyl-Amino-Tantalum to a Tantalum Source in Chemical Vapor Deposition of Tantalum Oxide Films
Toshiya Tabuchi, Yoshinori Sawado, Kunimasa Uematsu et al. · Japanese Journal of Applied Physics · 1991 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +16
Preparation of SrTiO<sub>3</sub> Films on 8-Inch Wafers by Chemical Vapor Deposition
Tomoko Tsuyama Arai, Yoshiaki Inaishi, Yoshinori Sawado et al. · Japanese Journal of Applied Physics · 1996 · 12 citations
Natural Sciences, Materials Engineering, Materials Science +13
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