Concepedia

Tomoko Tsuyama Arai

TT

Statistics

Publications

1

Citations

12

H-Index

1

Active since

1996

Tomoko Tsuyama Arai is an author specializing in deposition rate control, step coverage, and thin-film deposition.

Publications per year

1996–1996

1

Publications

1

Preparation of SrTiO<sub>3</sub> Films on 8-Inch Wafers by Chemical Vapor Deposition

Tomoko Tsuyama Arai, Yoshiaki Inaishi, Yoshinori Sawado et al. · Japanese Journal of Applied Physics · 1996 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +13

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