J. Michael Mori

Initial Collection Efficiency of Electret Filter and Its Durability for Solid and Liquid Particles [Translated]<sup>†</sup>

Yoshio Ōtani, Hitoshi Emi, J. Michael Mori · KONA Powder and Particle Journal · 1993 · 31 citations · Full text

Filtration, Initial Collection Efficiency, Chemical Engineering +14

<title>Characterization and modeling of a positive-acting chemically amplified resist</title>

John S. Petersen, Chris A. Mack, James W. Thackeray et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 27 citations

Engineering, Electron-beam Lithography, Chemistry +16

Removal of Fine Particles from Wafer Surface by Pulse Air Jets.

Yoshio Ōtani, Hitoshi Emi, Tetsuya Morizane et al. · KAGAKU KOGAKU RONBUNSHU · 1993 · 13 citations · Full text

Pulse Air Jets, Chemical Engineering, Behavioral Sciences +10

Fundamental study on the simultaneous removal of gaseous and particulate matters in room environment by fibrous filters

Yoshio Ōtani, H. Emil, J. Michael Mori et al. · Journal of Aerosol Science · 1991 · 12 citations

Filtration, Air Sampling, Engineering +8

The Development of Chemically Amplified Positive- and Negative-tone Resists for DUV Lithography.

James W. Thackeray, Tim Adams, Michael F. Cronin et al. · Journal of Photopolymer Science and Technology · 1994 · 10 citations · Full text

High Resolution, Engineering, Electron-beam Lithography +24