Concepedia

Patricia Wood

PW

1

Publications

33

Citations

1

H-Index

1985

Active since

Patricia Wood is an author specializing in applied physics, microfabrication, and electrical engineering.

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Publications per year

1985–1985

1

Publications

1

Dry etching of through substrate via holes for GaAs MMIC’s

L. G. Hipwood, Patricia Wood · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 33 citations

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