Concepedia

G. Csanky

GC

1

Publications

44

Citations

1

H-Index

1979

Active since

Affiliations

HRL Laboratories (United States)(Current)

G. Csanky is an author at HRL Laboratories (United States) specializing in engineering, ion beam physics, and instrumentation.

Top concepts

Publications per year

1979–1979

1

Publications

1

Ion-beam lithography for IC fabrication with submicrometer features

D.B. Rensch, R. L. Seliger, G. Csanky et al. · Journal of Vacuum Science and Technology · 1979 · 44 citations

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