Concepedia

Author

G. Csanky

HRL Laboratories (United States)

Also Known As

G. Csanky

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Publications

44

Citations

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H-Index

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Concepts

All Affiliations

HRL Laboratories (United States)
GC

About

G. Csanky is an author at HRL Laboratories (United States) specializing in engineering, ion beam physics, and instrumentation.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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2

Applied Physics

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44

3

Electrical Engineering

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4

Physics

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5

Integrated Circuits

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G. Csanky

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1

Publications

44

Citations

1

H-Index

YearCitations

Ion-beam lithography for IC fabrication with submicrometer features

D.B. Rensch, R. L. Seliger, G. Csanky,

Journal of Vacuum Science and Technology

1979

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