Concepedia

Author

Naoya Kimura

Advantest (Japan)

Also Known As

N. Kimura, Naoya Kimura

4

Publications

39

Citations

4

H-Index

17

Concepts

All Affiliations

Advantest (Japan)National Institute of Advanced Industrial Science and Technology
NK

About

Naoya Kimura is an author at Advantest (Japan) specializing in electrical engineering, instrumentation, and structural health monitoring.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Electrical Engineering

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Education

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Computer Engineering

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Systems Engineering

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Naoya Kimura

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2

Publications

24

Citations

2

H-Index

YearCitations

Monitoring of inner wall condition in mass-production plasma etching process using a load impedance monitoring system

Yuji Kasashima, Hiroyuki Kurita, Naoya Kimura,

Japanese Journal of Applied Physics

2015

13

Note: Practical monitoring system using characteristic impedance measurement during plasma processing

Taisei Motomura, Yuji Kasashima, O. Fukuda,

Review of Scientific Instruments

2014

11

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