Sergey Babin

An ultrahigh-resolution soft x-ray microscope for quantitative analysis of chemically heterogeneous nanomaterials

David A. Shapiro, Sergey Babin, Richard Celestre et al. · Science Advances · 2020 · 79 citations · Full text

Natural Sciences, Chemistry, Materials Science +16

Super-resolution surface slope metrology of x-ray mirrors

Valeriy V. Yashchuk, Simon Rochester, Ian Lacey et al. · Review of Scientific Instruments · 2020 · 19 citations · Full text

Engineering, Civil Engineering, Digital Imaging +15

Binary pseudorandom array test standard optimized for characterization of large field-of-view optical interferometers

Valeriy V. Yashchuk, Sergey Babin, Stefano Cabrini et al. · 2020 · 14 citations · Full text

Engineering, Manufacturing Engineering, Instrumentation +16

Fabrication of a refractive microlens integrated onto the monomode fiber

Sergey Babin, Matthieu Weber, Hans W. P. Koops · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 11 citations

Engineering, Materials Engineering, Materials Science +11

Application of analytic scanning electron microscopy to critical dimensions metrology at nanometer scale

Sergey Babin, Konstantin Bay, Justin J. Hwu · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 10 citations

Engineering, Materials Engineering, Materials Science +17