Concepedia
Statistics
Publications
4
Citations
65
H-Index
Active since
2012
Affiliations
Université Grenoble Alpes(Current)
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Laboratoire d'Électronique des Technologies de l'Information
Roche (France)
Institut polytechnique de Grenoble
Jorgen Lundgren is an author at Université Grenoble Alpes specializing in chemical engineering, natural sciences, and engineering.
Publications per year
2012–2019
Deposition of hydrogen chloride gas on copper wafer depending on humidity and HCl concentration
Minh‐Phuong Tran, Paola González‐Aguirre, C. Beitia et al. · Microelectronic Engineering · 2019 · 18 citations · Full text
Natural Sciences, Chemical Engineering, Chemistry +15
A comparative study of the HF sorption and outgassing ability of different Entegris FOUP platforms and materials
Paola González‐Aguirre, Hervé Fontaine, C. Beitia et al. · Microelectronic Engineering · 2012 · 17 citations
Natural Sciences, Chemical Engineering, Materials Science +8
Comparison of HF and HCl cross-contamination between different ENTEGRIS FOUP platforms and Cu-coated wafers
Fernando Herrán, Paola González‐Aguirre, C. Beitia et al. · Microelectronic Engineering · 2016 · 15 citations
Engineering, Chemical Engineering, Materials Engineering +9
FOUP decontamination solutions to control AMCs in semiconductor fabs: Gas purge or wet cleaning?
Paola González‐Aguirre, Hervé Fontaine, Seung Il Moon et al. · Microelectronic Engineering · 2018 · 15 citations
Engineering, Chemical Engineering, Process Safety +15
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