Concepedia

J.-P. van den Heuvel

JV

1

Publications

61

Citations

1

H-Index

2004

Active since

Affiliations

ASML (Netherlands)(Current)

J.-P. van den Heuvel is an author at ASML (Netherlands) specializing in engineering, nanotechnology, and microfabrication.

Top concepts

Publications per year

2004–2004

1

Publications

1

Deep-ultraviolet–microelectromechanical systems stencils for high-throughput resistless patterning of mesoscopic structures

M A F van den Boogaart, G. M. Kim, Rudy J. M. Pellens et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 61 citations · Full text

, , +15

Rows per page

1–1 of 1