Concepedia
Statistics
Publications
4
Citations
170
H-Index
Active since
2008
Affiliations
GlobalFoundries (Germany)(Current)
Cambridge Scientific (United States)
Fraunhofer Institute for Photonic Microsystems
Sergej Mutas is an author at GlobalFoundries (Germany) specializing in engineering, applied physics, and atomic physics.
Top concepts
EngineeringApplied PhysicsPhysicsMicroscopySpectroscopyAtomic PhysicsMaterial ScienceMicroelectronicsNatural SciencesElectronic Packaging
Publications per year
2008–2013
Investigations of field-evaporated end forms in voltage- and laser-pulsed atom probe tomography
Sergej Mutas, K. Wedderhoff, Christoph Klein et al. · Ultramicroscopy · 2008 · 70 citations
Engineering, Electron Microscopy, Physics +11
Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
Dina H. Triyoso, K. Hempel, Susanne Ohsiek et al. · ECS Journal of Solid State Science and Technology · 2013 · 48 citations
Materials Science, Materials Engineering, Electrical Engineering +12
Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
Fabian M. Koehler, Dina H. Triyoso, Imtiaz Hussain et al. · IOP Conference Series Materials Science and Engineering · 2012 · 37 citations · Full text
Engineering, Hkmg Stack, Chemical Deposition +17
Investigation of the analysis parameters and background subtraction for high-k materials with atom probe tomography
Sergej Mutas, Christoph Klein, Stephan Gerstl · Ultramicroscopy · 2010 · 15 citations
High-k Materials, Analysis Parameters, Engineering +14
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