Lester A. Pederson

Structural Composition of Polymers Relative to Their Plasma Etch Characteristics

Lester A. Pederson · Journal of The Electrochemical Society · 1982 · 67 citations

Natural Sciences, Materials Engineering, Materials Science +16

Speed enhancement of PMMA resist

Wayne M. Moreau, David J. Merritt, Wendell W. Moyer et al. · Journal of Vacuum Science and Technology · 1979 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +17

Chain scission efficiency of some polymers in γ‐radiation

A. C. Ouano, Dale E. Johnson, B. Dawson et al. · Journal of Polymer Science Polymer Chemistry Edition · 1976 · 26 citations

Natural Sciences, Chemistry, Materials Science +17

Compositional analyses of methyl methacrylate-methacrylic acid copolymers by carbon-13 nuclear magnetic resonance spectrometry

Duane E. Johnson, J. R. Lyerla, T. T. Horikawa et al. · Analytical Chemistry · 1977 · 17 citations

Natural Sciences, Chemistry, Materials Science +13

New Diazoketone Dissolution Inhibitors For Deep U.V. Photolithography

C. Grant Willson, Robert D. Miller, Dennis R. McKean et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1987 · 14 citations

Natural Sciences, Chemistry, Materials Science +13