T. Akashi

Statistics

Publications

Citations

102

H-Index

Active since

2006

Affiliations

Toyota Central Research and Development Laboratories (Japan)(Current)

Toyota Motor Corporation (Japan)

Tohoku University Hospital

Tohoku University

T. Akashi is an author at Toyota Central Research and Development Laboratories (Japan) specializing in engineering, microelectromechanical sensors, and microelectromechanical systems.

ORCID

Publications per year

2006–2017

Publications

Deep reactive ion etching of borosilicate glass using an anodically bonded silicon wafer as an etching mask

T. Akashi, Yasuhiro Yoshimura · Journal of Micromechanics and Microengineering · 2006 · 62 citations

Engineering, Materials Science, Electronic Materials +12

An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

Motohiro Fujiyoshi, Yutaka Nonomura, H. Funabashi et al. · 2011 · 14 citations

Engineering, Electrical Engineering, Mechatronics Engineering +14

Quad-seesaw-electrode type 3-axis tactile sensor with low nonlinearities and low cross-axis sensitivities

Yoshiyuki Hata, Yutaka Nonomura, Y. Omura et al. · Sensors and Actuators A Physical · 2017 · 14 citations

Engineering, Electrical Engineering, Mechatronics Engineering +11

An SOI tactile sensor with a quad seesaw electrode for 3-axis complete differential detection

Yoshiyuki Hata, Yutaka Nonomura, H. Funabashi et al. · 2014 · 12 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

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