Eric Shero

Thermal stability of polycrystalline silicon electrodes on ZrO2 gate dielectrics

C. Perkins, B. B. Triplett, Paul C. McIntyre et al. · Applied Physics Letters · 2002 · 68 citations

Engineering, Silicon On Insulator, Semiconductor Device +17

Conventional n-channel MOSFET devices using single layer HfO/sub 2/ and ZrO/sub 2/ as high-k gate dielectrics with polysilicon gate electrode

Yudong Kim, G. Gebara, M. B. Freiler et al. · 2002 · 61 citations

Zro/sub 2//Poly-si Transistors, Electrical Engineering, Zro/sub 2/ +13

Adsorption of Moisture and Organic Contaminants on Hafnium Oxide, Zirconium Oxide, and Silicon Oxide Gate Dielectrics

P. Raghu, Niraj Rana, C. T. Yim et al. · Journal of The Electrochemical Society · 2003 · 48 citations

Materials Science, Hafnium Oxide, Chemical Engineering +14

Atomic layer chemical vapor deposition of ZrO2-based dielectric films: Nanostructure and nanochemistry

Sunanda Dey, Chenyu Wang, Derek Tang et al. · Journal of Applied Physics · 2003 · 45 citations

Engineering, Native Oxide, Nm Layer +18

Interactions of moisture and organic contaminants with SiO2 and ZrO2 gate dielectric films

Niraj Rana, P. Raghu, Eric Shero et al. · Applied Surface Science · 2003 · 21 citations

Materials Science, Chemical Engineering, Dielectric Films +9