Peter Krabbendam

The future of EUV lithography: enabling Moore's Law in the next decade

Alberto Pirati, Jan van Schoot, Kars Troost et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 62 citations

Engineering, Electrical Engineering, Optics +12

High-NA EUV lithography enabling Moore’s law in the next decade

Jan van Schoot, Kars Troost, Frank Bornebroek et al. · 2017 · 20 citations

Natural Sciences, Computer Systems, Digital Imaging +12

The future of EUV lithography: continuing Moore's Law into the next decade

Jan van Schoot, Kars Troost, Frank Bornebroek et al. · 2018 · 10 citations

Engineering, Manufacturing Engineering, Biomedical Imaging +13