Concepedia

Holger Spahr

HS

Statistics

Publications

4

Citations

97

H-Index

4

Active since

2013

Affiliations

Technische Universität Braunschweig(Current)

Holger Spahr is an author at Technische Universität Braunschweig specializing in atomic layer deposition, electronic materials, and natural sciences.

Publications per year

2013–2013

4

Publications

4

Conduction mechanisms in thin atomic layer deposited Al2O3 layers

Holger Spahr, Sebastian Montzka, Johannes Reinker et al. · Journal of Applied Physics · 2013 · 43 citations

, , +17

Enhancement of the maximum energy density in atomic layer deposited oxide based thin film capacitors

Holger Spahr, Christine Nowak, Felix Hirschberg et al. · Applied Physics Letters · 2013 · 23 citations

, , +17

Regimes of leakage current in ALD-processed Al<sub>2</sub>O<sub>3</sub>thin-film layers

Holger Spahr, Johannes Reinker, Tim Bülow et al. · Journal of Physics D Applied Physics · 2013 · 17 citations

, , +17

Impact of morphological defects on the electrical breakdown of ultra thin atomic layer deposition processed Al2O3 layers

Holger Spahr, Tim Bülow, Christine Nowak et al. · Thin Solid Films · 2013 · 14 citations

, , +13

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