Publication | Closed Access
Impact of morphological defects on the electrical breakdown of ultra thin atomic layer deposition processed Al2O3 layers
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Citations
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References
2013
Year
Materials ScienceAl2o3 LayersElectrical EngineeringAluminium NitrideEngineeringSurface ScienceApplied PhysicsMorphological DefectsElectrical BreakdownChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film ProcessingElectrical Insulation
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