Concepedia

P.S. Hauge

PH

20

Publications

1.8K

Citations

15

H-Index

1967

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

University of Minnesota

P.S. Hauge is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, instrumentation, and physics.

Top concepts

EngineeringInstrumentationPhysicsApplied PhysicsEducationOptical PropertiesCalibrationMeasurementNatural SciencesElectrical Engineering

Publications per year

1967–1989

20

Publications

20

Characterization of positive photoresist

F.H. Dill, W.P. Hornberger, P.S. Hauge et al. · IEEE Transactions on Electron Devices · 1975 · 416 citations

Positive Photoresist Exposure, Image Formation, Functional Parameters +14

Recent developments in instrumentation in ellipsometry

P.S. Hauge · Surface Science · 1980 · 237 citations

Engineering, Measurement, Calibration +6

Generation of performance constraints for layout

R. Nair, C.L. Berman, P.S. Hauge et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1989 · 195 citations

Engineering, Computer Architecture, Network Analysis +23

Mueller matrix ellipsometry with imperfect compensators

P.S. Hauge · Journal of the Optical Society of America · 1978 · 173 citations

Mueller Matrix, Optical Materials, Engineering +22

Design and Operation of ETA, an Automated Ellipsometer

P.S. Hauge, F.H. Dill · IBM Journal of Research and Development · 1973 · 147 citations

Optical Materials, Engineering, Geometry +25

Rows per page

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