P.S. Hauge

Characterization of positive photoresist

F.H. Dill, W.P. Hornberger, P.S. Hauge et al. · IEEE Transactions on Electron Devices · 1975 · 422 citations

Natural Sciences, Materials Engineering, Optical Materials +9

Recent developments in instrumentation in ellipsometry

P.S. Hauge · Surface Science · 1980 · 240 citations

Engineering, Electrical Engineering, Geometry +8

Generation of performance constraints for layout

R. Nair, C.L. Berman, P.S. Hauge et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1989 · 199 citations

Engineering, Computer Engineering, Electrical Engineering +17

Mueller matrix ellipsometry with imperfect compensators

P.S. Hauge · Journal of the Optical Society of America · 1978 · 174 citations

Natural Sciences, Physics, Optics +15

Design and Operation of ETA, an Automated Ellipsometer

P.S. Hauge, F.H. Dill · IBM Journal of Research and Development · 1973 · 147 citations

Engineering, Electrical Engineering, Materials Science +17