Concepedia

M. Chen

MC

1

Publications

14

Citations

1

H-Index

2001

Active since

Affiliations

Chinese Academy of Sciences(Current)

M. Chen is an author at Chinese Academy of Sciences specializing in microelectronics, materials science, and electronic packaging.

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Publications per year

2001–2001

1

Publications

1

Effect of implantation energy on the microstructure evolution of low dose separation of implanted oxygen wafers

M. Chen, J. Chen, Wanhua Zheng et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 14 citations

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