Concepedia

J. Chen

JC

1

Publications

14

Citations

1

H-Index

2001

Active since

Affiliations

Shanghai Institute of Microsystem and Information Technology(Current)

J. Chen is an author at Shanghai Institute of Microsystem and Information Technology specializing in microelectronics, materials science, and electronic packaging.

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Publications per year

2001–2001

1

Publications

1

Effect of implantation energy on the microstructure evolution of low dose separation of implanted oxygen wafers

M. Chen, J. Chen, Wanhua Zheng et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 14 citations

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