Statistics
Publications
17
Citations
480
H-Index
13
Active since
1991
Kuang‐Jung Chen is an author at IBM Research - Almaden specializing in natural sciences, materials science, and customer satisfaction.
Publications per year
1991–2023
17
17
Line edge roughness reduction by plasma curing photoresists
Arpan P. Mahorowala, Kuang‐Jung Chen, Ratnam Sooriyakumaran et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 41 citations
Natural Sciences, Electrical Engineering, Materials Science +16
1–5 of 17