Concepedia

L.T. Koh

LK

4

Publications

145

Citations

4

H-Index

2001

Active since

Affiliations

Singapore Science Park(Current)

Institute of Microelectronics

National University of Singapore

L.T. Koh is an author at Singapore Science Park specializing in materials science, microstructure, and plasma science.

Top concepts

Publications per year

2001–2002

4

Publications

4

Study of microstructure and resistivity evolution for electroplated copper films at near-room temperature

W. H. Teh, L.T. Koh, S.M Chen et al. · Microelectronics Journal · 2001 · 62 citations

Investigation of the effects of byproduct components in Cu plating for advanced interconnect metallization

L.T. Koh, Guoqiang You, C.Y. Li et al. · Microelectronics Journal · 2002 · 34 citations

Factors influencing open circuit decomposition behavior of sulfur-containing additive component used in Cu plating for advanced interconnect metallization

L.T. Koh, Guoxiang You, Si Ying Lim et al. · Microelectronics Journal · 2001 · 29 citations

COMPARATIVE STUDY OF IONIZED METAL PLASMA <font>Ta, TaN</font> AND MULTISTACKED <font>Ta/TaN</font> STRUCTURE AS DIFFUSION BARRIERS FOR <font>Cu</font> METALLIZATION

C. Y. LI, Lei He, J. Wu et al. · Surface Review and Letters · 2001 · 20 citations

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