Makoto Uehara

Rotatable Offner imaging system for ellipsometric measurement

Lianhua Jin, Takumi Tanaka, Eiichi Kondoh et al. · Review of Scientific Instruments · 2017 · 17 citations · Full text

High Resolution, Ellipsometric Measurement, Rotatable Offner System +17

Laser Step Alignment For A Wafer Stepper

S. Murakami, T. Matsuura, M. Ogawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1985 · 15 citations

Advanced Laser Processing, Engineering, Calibration +11

Extracting calibrated parameters from imaging ellipsometric measurement

Lianhua Jin, Takumi Tanaka, Eiichi Kondoh et al. · Japanese Journal of Applied Physics · 2017 · 13 citations

Ellipsometric Measurement, Engineering, Measurement +19

Calibration of the retardation inhomogeneity for the compensator-rotating imaging ellipsometer

Lianhua Jin, Yuki Iizuka, Takashi Iwao et al. · Applied Optics · 2019 · 10 citations

Measuring concerns about the COVID-19 vaccine among Japanese internet users through search queries

Makoto Uehara, Sumio Fujita, Nobuyuki Shimizu et al. · Scientific Reports · 2022 · 10 citations · Full text