Concepedia

Gina L. Weibel

GL

4

Publications

259

Citations

4

H-Index

2000

Active since

Affiliations

Cornell University(Current)

Gina L. Weibel is an author at Cornell University specializing in engineering, materials science, and applied physics.

Top concepts

Publications per year

2000–2002

4

Publications

4

An overview of supercritical CO2 applications in microelectronics processing

Gina L. Weibel, Christopher K. Ober · Microelectronic Engineering · 2002 · 198 citations

, , +4

Design strategies for 157-nm single-layer photoresists: lithographic evaluation of a poly(α -trifluoromethyl vinyl alcohol) copolymer

Dirk Schmaljohann, Young Chan Bae, Gina L. Weibel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 22 citations

, , +20

E-Beam Patterning of Hot-Filament CVD Fluorocarbon Films Using Supercritical CO2 as a Developer

Hilton G. Pryce Lewis, Gina L. Weibel, Christopher K. Ober et al. · Chemical Vapor Deposition · 2001 · 21 citations

, , +15

Fundamental Studies of Fluoropolymer Photoresists for 157 nm Lithography.

Dirk Schmaljohann, Cheol Bae Young, Jun Yan Dai et al. · Journal of Photopolymer Science and Technology · 2000 · 18 citations · Full text

, , +22

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