Van N. Truskett

Development of imprint materials for the Step and Flash Imprint Lithography process

Frank Xu, Nicholas A. Stacey, M. Watts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 30 citations

Engineering, Materials Engineering, Materials Science +16

Defect reduction for semiconductor memory applications using jet and flash imprint lithography

Zhengmao Ye, Kang Luo, J. W. Irving et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 27 citations

Engineering, Materials Engineering, Materials Science +15

High throughput Jet and Flash Imprint Lithography for semiconductor memory applications

Wei Zhang, Brian Fletcher, Ecron Thompson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 19 citations

Engineering, Manufacturing Engineering, Materials Science +11

High-throughput jet and flash imprint lithography for advanced semiconductor memory

Niyaz Khusnatdinov, Zhengmao Ye, Kang Luo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 16 citations

Engineering, Manufacturing Engineering, Materials Science +13