D. J. Mikalsen

Collimated magnetron sputter deposition

S. M. Rossnagel, D. J. Mikalsen, Hideki Kinoshita et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 146 citations

Materials Science, Engineering, Electron-beam Lithography +14

Measurement of thermal stress and stress relaxation in confined metal lines. I. Stresses during thermal cycling

M. Moske, Paul S. Ho, D. J. Mikalsen et al. · Journal of Applied Physics · 1993 · 36 citations

Bending Beam Technique, Quartz Confinement, Engineering +29

Stress modification of WSi2.2 films by concurrent low energy ion bombardment during alloy evaporation

D. S. Yee, J. A. Floro, D. J. Mikalsen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 29 citations

Stress Modification, Engineering, Chemical Deposition +18

Superconducting thin films of the Bi–Sr–Ca–Cu–O system prepared by multilayer metal deposition

D. J. Mikalsen, R. Roy, D. S. Yee et al. · Journal of materials research/Pratt's guide to venture capital sources · 1988 · 21 citations

Materials Science, Bi–sr–ca–cu–o System, Superconducting Material +9

A Three‐Layer Resist System for Deep U.V. and RIE Microlithography on Nonplanar Surfaces

E. Bassous, L. M. Ephrath, G. T. Pepper et al. · Journal of The Electrochemical Society · 1983 · 20 citations

Resist Image Pattern, Engineering, Electron-beam Lithography +19