F. G. Böbel

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Active since

1994

Affiliations

Fraunhofer Institute for Integrated Circuits(Current)

F. G. Böbel is an author at Fraunhofer Institute for Integrated Circuits specializing in temperature measurement, thin films, and materials engineering.

Publications per year

1994–1995

Publications

Pyrometric interferometry for real time molecular beam epitaxy process monitoring

F. G. Böbel, H.J. Möller, A. M. Wowchak et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +17

In situ real-time temperature and thickness measurement for growth on MBE and RTCVD systems

H.J. Möller, F. G. Böbel, Brigitte Hertel et al. · Journal of Crystal Growth · 1995 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +16

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