Concepedia

Ichiko Sugiyama

IS

Statistics

Publications

2

Citations

116

H-Index

2

Active since

1992

Affiliations

Tohoku University(Current)

Ichiko Sugiyama is an author at Tohoku University specializing in engineering, ozone, and environmental engineering.

ORCID

Top concepts

Publications per year

1992–1992

2

Publications

2

Metallic Impurities Segregation at the Interface Between Si Wafer and Liquid during Wet Cleaning

T. Ohmi, Takashi Imaoka, Ichiko Sugiyama et al. · Journal of The Electrochemical Society · 1992 · 89 citations

, , +17

Ozone Decomposition in Ultrapure Water and Continuous Ozone Sterilization for a Semiconductor Ultrapure Water System

Tadahiro Ohmi, T. Isagawa, Takashi Imaoka et al. · Journal of The Electrochemical Society · 1992 · 27 citations

, , +14

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