Statistics
Publications
3
Citations
78
H-Index
3
Active since
2005
Affiliations
Samsung (South Korea)(Current)
Youngjae Jung is an author at Samsung (South Korea) specializing in electrical engineering, engineering, and plasma etching.
Publications per year
2005–2007
3
3
Effects of various plasma pretreatments on 193nm photoresist and linewidth roughness after etching
Myeong-Cheol Kim, Denis Shamiryan, Youngjae Jung et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 41 citations
Natural Sciences, Materials Engineering, Materials Science +16
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