Concepedia

Seong-Sue Kim

SK

Statistics

Publications

3

Citations

70

H-Index

3

Active since

2007

Affiliations

Samsung (South Korea)(Current)

Seong-Sue Kim is an author at Samsung (South Korea) specializing in engineering, applied physics, and optical systems.

Top concepts

Publications per year

2007–2017

3

Publications

3

Progress in EUV lithography toward manufacturing

Seong-Sue Kim, Roman Chalykh, Hoyeon Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 48 citations

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Properties of EUVL masks as a function of capping layer and absorber stack structures

Hwan-Seok Seo, Jin‐hong Park, Seungyoon Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 12 citations

Electro-optical system for scanning microscopy of extreme ultraviolet masks with a high harmonic generation source

Patrick Naulleau, Christopher N. Anderson, Erik H. Anderson et al. · Optics Express · 2014 · 10 citations · Full text

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