Statistics
Publications
3
Citations
70
H-Index
3
Active since
2007
Affiliations
Samsung (South Korea)(Current)
Seong-Sue Kim is an author at Samsung (South Korea) specializing in mask design, mask fabrication, and optical materials.
Publications per year
2007–2017
3
3
Properties of EUVL masks as a function of capping layer and absorber stack structures
Hwan-Seok Seo, Jin‐hong Park, Seungyoon Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 12 citations
Natural Sciences, Materials Engineering, Materials Science +17
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