Concepedia

Roman Chalykh

RC

Statistics

Publications

2

Citations

61

H-Index

2

Active since

2016

Affiliations

Samsung (South Korea)(Current)

Roman Chalykh is an author at Samsung (South Korea) specializing in applied physics, surface science, and microfabrication.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicrofabricationGraphene3D PrintingNanomaterialsNanotechnologyNanoengineering

Publications per year

2016–2017

2

Publications

2

Progress in EUV lithography toward manufacturing

Seong-Sue Kim, Roman Chalykh, Hoyeon Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 48 citations

Materials Science, Electrical Engineering, Engineering +15

Study of nanometer-thick graphite film for high-power EUVL pellicle

Mun Ja Kim, Hwan Chul Jeon, Roman Chalykh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 13 citations

Engineering, Surface Nanotechnology, Euv Pellicle Membrane +20

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