Concepedia
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Publications
1
Citations
16
H-Index
Active since
2001
Phillip Schubert is an author specializing in thermal properties of semiconductors, materials engineering, and engineering.
Publications per year
2001–2001
LPCVD of Silicon Nitride from Dichlorosilane and Ammonia by Single Wafer Rapid Thermal Processing
Dana Teasdale, Yoshihide Senzaki, Robert Herring et al. · Electrochemical and Solid-State Letters · 2001 · 16 citations
Engineering, Materials Engineering, Materials Science +17
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