Statistics
Publications
4
Citations
82
H-Index
4
Active since
1991
Affiliations
T. Tschan is an author at University of Neuchâtel specializing in mechanical engineering, engineering, and instrumentation.
Publications per year
1991–2002
4
4
Deep dry etching techniques as a new IC compatible tool for silicon micromachining
Christian Linder, T. Tschan, Ν. F. de Rooij · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 34 citations · Full text
Engineering, Mechanical Engineering, Integrated Circuits +20
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