Concepedia

Morimichi Mutoh

MM

3

Publications

62

Citations

3

H-Index

1998

Active since

Affiliations

Hokkaido University(Current)

Morimichi Mutoh is an author at Hokkaido University specializing in applied physics, engineering, and electrical engineering.

Top concepts

EngineeringApplied PhysicsOptoelectronicsSurface ScienceMicroelectronicsElectrical EngineeringSemiconductorsMaterial ScienceElectronic DevicesIntegrated Circuits

Publications per year

1998–1999

3

Publications

3

Surface passivation of GaAs with ultrathin Si3N4/Si interface control layer formed by MBE and in situ ECR plasma nitridation

Tamotsu Hashizume, Kengo Ikeya, Morimichi Mutoh et al. · Applied Surface Science · 1998 · 27 citations

Electrical Engineering, Engineering, Surface Science +7

In-situ characterization technique of compound semiconductor heterostructure growth and device processing steps based on UHV contactless capacitance-voltage measurement

Hiroshi Takahashi, Toshiyuki Yoshida, Morimichi Mutoh et al. · Solid-State Electronics · 1999 · 19 citations

Electrical Engineering, Wafer Scale Processing, Engineering +8

Effects of Initial Surface Reconstruction on Silicon Interface Control Layer Based Passivation of (001) GaAs Surfaces Studied in an Ultrahigh-Vacuum Multichamber System

Morimichi Mutoh, Naohiro Tsurumi, HidekiHasegawa HidekiHasegawa · Japanese Journal of Applied Physics · 1999 · 16 citations

Engineering, Semiconductor Materials, Optoelectronic Devices +21

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