Concepedia

M. Orfert

MO

Statistics

Publications

3

Citations

77

H-Index

3

Active since

1998

Affiliations

Technische Universität Dresden(Current)

M. Orfert is an author at Technische Universität Dresden specializing in applied physics, engineering, and surface science.

Top concepts

Publications per year

1998–1999

3

Publications

3

Plasma enhanced chemical vapor deposition of SiN-films for passivation of three-dimensional substrates

M. Orfert, K. Richter · Surface and Coatings Technology · 1999 · 35 citations

, , +6

Deep plasma silicon etch for microfluidic applications

K. Richter, M. Orfert, Steffen Howitz et al. · Surface and Coatings Technology · 1999 · 26 citations

, , +4

Plasma deposition of Si-N and Si-O passivation layers on three-dimensional sensor devices

P. E. Schmid, M. Orfert, Malte Ruben Vogt · Surface and Coatings Technology · 1998 · 16 citations

, , +11

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