Concepedia

Y. Chen

YC

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Publications

1

Citations

13

H-Index

1

Active since

1998

Affiliations

Centre National de la Recherche Scientifique(Current)

Y. Chen is an author at Centre National de la Recherche Scientifique specializing in nanolithography, nanofabrication, and microfabrication.

Top concepts

Publications per year

1998–1998

1

Publications

1

Edge diffraction enhanced printability in x-ray nanolithography

Y. Chen, G. Simon, Anne‐Marie Haghiri‐Gosnet et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 13 citations

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