Robert P. Timon is an author at Sandia National Laboratories specializing in microelectronics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMaterials EngineeringPhysicsHeat TransferThermodynamicsSurface ScienceMicrofabrication
Publications per year
2005–2017
2
2
Revisiting the Removal Rate Model for Oxide CMP
J. Sorooshian, L. Borucki, David J. Stein et al. · Journal of Tribology · 2005 · 34 citations
Engineering, Thermal Silicon Dioxide, Silicon On Insulator +18
Rows per page
1–2 of 2